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Components for the Higher Harmonics of the Ti:Sapphire Laser (125 – 250 nm)

The fourth, fifth and sixth harmonics of the Ti:Sapphire laser provide fs-pulses in the DUV/VUV range. These harmonics offer a variety of applications in spectroscopy as well as in materials science. Optics for these very special applications must be optimized for high reflectance and low dispersion. Mirrors and separators for the wavelength range 125 – 215 nm consist of fluoride layer systems on CaF2 substrates while components for longer wavelengths can be made of oxides. For mirrors, LAYERTEC recommends substrates with a thickness of 3 mm or 6.35 mm to achieve good flatness values. For special separators, LAYERTEC offers substrates of Fused Silica or calcium fluoride as thin as 1 mm or 0.5 mm.

Turning Mirrors and Separators for the Fourth Harmonic at AOI = 45°

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Fig.1:Reflectance and GDD spectra of a separator for the fourth harmonic from the longer wavelength harmonics and the fundamental wave (AOI = 45°)
a)Reflectance vs. wavelength (measured)
b)Reflectance vs. wavelength (calculated)
c)GDD vs. wavelength (calculated)

Components for the Fifth Harmonic at AOI = 45°

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Fig.2:Reflectance and GDD spectra of a turning mirror for 160 nm (AOI = 45°)
a)Reflectance vs. wavelength (measured)
b)GDD vs. wavelength (calculated)

Components for the Sixth Harmonic at AOI = 45°

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Fig.3:Reflectance and GDD spectra of a turning mirror for 133 nm (AOI = 45°)
a)Reflectance vs. wavelength (measured for unpolarized light)
b)GDD vs. wavelength (calculated)

Bandwidth of the Reflectance and Low-GDD Range of Standard Components

Table 1:Bandwidth of the reflectance and low-GDD range of standard components
ComponentWavelength RangeP-Polarization (|GDD| < 20 fs²)S-Polarization (|GDD| < 20 fs²)
Turning mirror or separator 3rd harmonic250 nm – 330 nm30 nm (R > 99 %)50 nm (R > 99 %)
Dual wavelength turning mirror250 nm – 330 nm
370 nm – 500 nm
15 nm (R > 99 %)
34 nm (R > 99 %)
26 nm (R > 99 %)
72 nm (R > 99 %)
Turning mirror or separator 4th harmonic180 nm – 250 nm5 nm (R > 93 %)15 nm (R > 97 %)
Turning mirror or separator 5th harmonic140 nm – 180 nm4 nm (R > 90 %)12 nm (R > 97 %)
Turning mirror or separator 6th harmonic125 nm – 140 nm8 nm (R > 85 % unpolarized)
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