Lithographically Structured Coatings

For specific applications, only selected areas of an optical surface must be coated, or different coating systems must be combined on a single substrate. Using our lithographic processes, we produce defined structures ranging from a few micrometers to several millimeters in size—precisely aligned and laser-resistant up to high-power levels.

Typical Applications

Advantages

Typical Applications

Polka-dot beam splitters and multi-zone filters
Pinholes and masks for beam shaping and alignment
Structured phase or polarization optics
Applications in high-power laser and metrology systems

Fig.1:Example Products

a)Polka-dot beam splitter

b)Dielectric pinhole

Advantages

Combination of multiple coatings on one surface (e.g., reflection, polarization, or transmission zones)
Structure sizes below 5 µm with high edge quality
Compatible with all LAYERTEC coating systems (AR, HR, PBS, filters, etc.)
Laser-induced damage threshold (LIDT) comparable to unstructured coatings
High cleanliness and quality through cleanroom lithography and in-house manufacturing

Fig.2:Pictures from our manufacturing

a)Structured AR/HR combination on a plate

b)LAYERTEC lithography cleanroom

Learn more about the underlying lithographic structuring technology at LAYERTEC under Lithography.