Datasheet - Turning Mirror 101354

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Turning Mirror:
CaF2 (193nm) || plane | Ø=30.0(-0.1)mm | t=5(±0.1)mm | //<5min
S1: commercial polish | chamfer 0.3
     uncoated
S2(^): Øe21 | 3/0.2(0.2) [L/10] | 5/2x0.04; L1x0.004 | chamfer 0.3
     HRu(45°,193nm)>95% (fluoridic)

Product

plane+plane
Round
Article
101354
Type
  • Turning Mirror
Laser category
  • ns-Laser Optics
Laser type
  • ArF-Laser
Price per unit (net.)
on request
discount ▼
from 5 pieces
5 %
from 10 pieces
10 %
from 20 pieces
20 %
Stock
0

General Optical Parameters

Material
CaF2 (E193) random
Shape
Round
Diameter (Ø)
30 mm
(-0.1  mm)
Thickness (t)
5 mm
(±0.1 mm)
Parallelism

Optical Parameters Front Side  (S2)

Optical Parameters Rear Side  (S1)

Shape
plane
Chamfer
0.3 mm
Test area Øe
21
Surface form tolerance
3/0.2(0.2) [L/10 @546nm]
Cleanliness
5/3x0.1
Shape
plane
Chamfer
0.3 mm
 

Coating specifications front side  (S2)

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Uncoated
1st operating range   HRu(45°,193nm)>95%
Type
High Reflectance
Polarisation
unpol.
unpolarized  =  s + p2
Angle of incidence
45°
Wavelength range
193 nm
HR
> 95 %