Multipass cell-based EUV sources for industry, research and life science (MULTIPASS)

Project of LAYERTEC GmbH

Pulse compression optics with high-performance multi-pass cells

Project partners

Active Fiber Systems GmbH, JenaFriedrich-Schiller-University Jena, Institute for Applied Physics

Project description

In cooperation with the project partners, multipass cells for pulse compression of high-power ultrashort pulse lasers are to be developed. The aim of the project is to develop ultrafast light sources that emit extremely short light pulses (τ < 10 fs) with high average power in the wavelength range around 1000 nm. LAYERTEC is developing the substrates and coatings of the mirrors for various types of multi-pass cells.

The partners' aim is to convert the radiation into the EUV range in order to provide users with a powerful tool for investigating extremely small structures (bacteria, viruses, structures on microchips).

Results

Various multipass cells were developed and successfully tested by the partners. The mirrors for the cells are designed for the specific conditions at the project partners (length of the multipass cell, gas type, pressure). In the 1 µm range the following parameters were achieved

• compression from 200 fs to 30 fs with 950 W output power
• compression from 30 fs to 7 fs using extremely broadband coatings
• compression from 200 fs to 13 fs with a special mirror array

Furthermore, multipass cells for the 2 µm range were demonstrated for the first time. Here, 15 fs pulses were achieved.