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Bauteile für ArF Laser
Mirrors, Output Couplers and Lenses
- All fluoride systems guarantee high reflectivities and high damage thresholds
- PR coatings with tolerances of:
- ± 2 % for R = 10 … 30 %
- ± 3 % for R = 30 … 75 %
- ± 2 % for R = 75 … 90 % and
- ± 1 % for R > 90 %
- High quality mirror substrates, windows and lenses of CaF2 (193 nm excimer grade) and fused silica
- Development and production of customer specific components such as beamsplitters and variable attenuators on request
- Single wavelength AR coating with residual reflectivities of R < 0.25 % at AOI = 0° and R < 0.6 % at AOI = 45° (unpolarized light)
- Broadband and multiple wavelength AR coatings

Variable Attenuators
- Attenuators with different transmission ranges on request
- Attenuators can be delivered with AR coated compensation plates of CaF2 of fused silica

Aluminium Mirrors
- Enhanced aluminum mirrors:
- Rp > 93 %
- Rs > 99 %
- Rr > 96 %

Technical Data of standard ArF Laser Components
Coating | Substrate | Damage threshold* | Lifetime test |
---|---|---|---|
Fluoride coatings | |||
AR(0°, 193 nm), R < 0.25 % | CaF2 | 4 – 5 J/cm2 | 2.5 x 108 pulses, no damage** |
AR(0°, 193 nm), R < 0.25 % | fused silica | 2 – 3 J/cm2 | |
PR(0°, 193 nm), R = 25 % | CaF2 | 3 – 4 J/cm2 | 2.5 x 108 pulses, no damage** |
PR(0°, 193 nm), R = 50 % | CaF2 | 2 – 3 J/cm2 | 109 pulses*** |
HR(0°, 193 nm), R > 96 % | CaF2 | 2 – 3 J/cm2 | 109 pulses***, no damage 1010 pulses****, no damage 4 x 109 pulses*****, no damage |
HR(45°, 193 nm), R > 95 % (random polarized) | CaF2 | 2 – 3 J/cm2 | |
Oxide coatings | |||
HR(0°, 193 nm), R > 92 % | fused silica | <1 J/cm2 |
* | 1000-on-1, 14 ns; measurements were performed at Laser Labor Göttingen and at Friedrich-Schiller-Universität Jena |
** | Energy density: 18 mJ/cm2, repetition rate: 4 kHz, pulse duration: 30 ns; tested at COHERENT AG, Göttingen |
*** | Energy density: 55 mJ/cm2, repetition rate: 1 kHZ, pulse duration 15 ns; tested at COHERENT AG, München |
**** | Energy density: 27 mJ/cm2, repetition rate: 4 kHz, pulse duration: 30 ns; tested at COHERENT AG, Göttingen |
***** | Energy density: 80 mJ/cm2, repetition rate: 1 kHz, pulse duration: 12 ns; tested at COHERENT AG, München |