Bauteile für F2 Laser

Mirrors, Output Couplers and Lenses

laser mirror and turning mirrorFigure 1: Measured reflectance and transmittance spectra of a laser mirror (AOI = 0°, a) and a turning mirror (AOI = 45°, b) for 157nm
silver mirror for fs-lasersFigure 2: Measured reflectance spectra of standard output couplers with R = 50 ± 3% and R = 25 ± 2% (rear side uncoated)
  • Laser mirrors: R = 92 ... 95% at AOI = 0°
  • Turning mirrors (AOI = 45°):
    • Rs > 97%
    • Rp > 90%
    • Rr > 92%
  • High quality mirror substrates, windows and lenses of CaF2 (157nm excimer grade quality, SCHOTT AG)
  • PR coatings with tolerances of
    • ± 2 % for R = 10 ... 30%
    • ± 3 % for R = 30 ... 75% and
    • ± 2 % for R = 75 ... 90%
  • Development and production of customer specific components as beamsplitters and variable attenuators on request

Variable Attenuators

laser mirror and turning mirrorFigure 3: Measured transmittance spectra of a variable attenuator at different AOI (a) and transmittance vs. AOI (b); the transmittance varies from T > 75% at AOI = 0° to T < 5% at AOI = 45°

Aluminium Mirror for F2 Lasers

protected and enhanced Al mirror for 157nmFigure 4: Reflectance spectrum of a protected Al mirror (a) and an enhanced Al mirror for 157nm (b)
  • Protected Al mirrors (optimized for 157nm): R = 74 ... 78%
  • Dielectrically enhanced Al mirrors: up to R = 94% at AOI = 0°
  • For more information on Al mirrors see pages 96 – 97 in our catalog.

Technical Data of standard F2 Laser Components

CoatingSpectral performanceLifetime test
HR (0°, 157nm)R = 92 ... 95%2 x 108 – 1 x 109 pulses*
HR (45°, 157nm)R = 90 ... 94% (random pol.)
PR (0°, 157nm)R = 50 ± 3%2 x 108 – 1 x 109 pulses*
PR (0°, 157nm)R = 25 ± 3%2 x 108 – 1 x 109 pulses*
AttenuatorT = 67 ± 3%5 x 107 pulses**, no damage
AttenuatorT = 33 ± 3%1 x 108 pulses***, no damage
Beam splitterT = 20 ± 3%1 x 108 pulses***, no damage
AR (0°, 157nm)0.3 ... 0.7%
*Energy density: 25mJ/cm2, repetition rate: 800Hz, pulse duration: 15ns; tested at COHERENT AG, München
** MEnergy density: 15mJ/cm2, rep. rate: 200Hz, pulse duration: 20ns; tested at Institut für Photonische Technologien (IPHT) Jena
*** Energy density: 20mJ/cm2, rep. rate: 50Hz, pulse duration: 20ns; tested at Institut für Photonische Technologien (IPHT) Jena